Elastic and Inelastic Surface Effects on Ion Penetration and the Resulting Sputtering and Backscattering*

The computer code ITMC (_Ion transport in Materials and Compounds) has been developed to study in detail the transport of charged particles in solid materials and surface related phenomena such as sputtered atoms and backscattered ions. The code is based on Monte Carlo methods to follow the path and the damage produced by the charged particles in three dimension as they slow down in target materials. Single-element targets as well as alloys with possible different surface and bulk compositions or with layered structures of different materials can be used. Various models developed to calculate the Inelastic energy losses with target electrons can be used in the code. Moat known interatomic potentials can also be used to calculate the elastic energy losses. The major advantages of the code are its ability and flexibility to use and compare various models of elastic and inelastic energy losses in any target with different compounds and different surface and bulk composition.